Opto-mechanical Modeling for Fabrication of MEMS Micro- Mirrors
نویسندگان
چکیده
Micro-mirror arrays are currently being developed by a number of companies for optical switching. To bring these products to the market quickly, a rapid development cycle is needed, leaving little time for multiple fabrication runs. CAD tools for MEMS can reduce the number of fabrication iterations run by allowing prototyping to occur within the virtual environment. Here, many models can be tested quickly and the design can be optimized prior to initial fabrication. Modeling of micro-mirrors requires unique simulation capabilities beyond those required for traditional MEMS devices. In many cases, the device alone has unique features which require that CAD tools offer additional capabilities beyond typical electro-mechanical analysis. Second, the entire array must be studied, both from a fabrication and optical perspective. The output of a MEMS software CAD tool is input into an optical ray-tracing program to provide optical system performance of the total MEMS micro-mirror and provide non-sequential ray-tracing of a micro-mirror array. This paper will present a method for rapidly developing MEMS micro-mirrors by utilizing CAD tools currently available. Design begins with a mask layout which leads to analysis of one mirror. These results are then used to model a complete array.
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